IIT School

A three-day school will cover fundamental and practical aspects of ion implantation and annealing in research and production environments. The individual topics will be lectured by a dozen world-class experts from industry and academia. An approx. 600-page hardcover book will be handed out to the participants.

IIT School Topics

1. History of Integrated Circuits and Ion Implantation
2. Ion Implanter Equipment - I: Ion Sources, Beams, and Space Charge Control
3. Ion Implanter Equipment - II: Ion Transport and Beam Line Control
4. Commercial Equipment Overview, their Specialties, and Applications
5. Annealing Equipment Hardware
6. Metrology for Ion Implantation and Annealing
7. Contamination and Ion Beam Purity
8. Safety Considerations for Ion Implantation, RTP, and Furnace
9. Defects in Si, SiC, and its Annealing
10. Diffusion and Activation of Dopants; The Science of Annealing Wafers
11. Ion Channeling in Si and SiC
12. Process Integration and Applications for Logic, Memory, and Image Sensors
13. Process Integration and Applications for Power Devices According to Various Wafer Substrates
14. Future in Process Integration